Effect of the composition and thermal annealing on the transformation temperatures of sputtered TiNi shape memory alloy thin films

摘要

After sputter-deposited amorphous TiNi films were subjected to heat treatment higher than 600 K, the shape memory alloys (SMAs) showed strong dependence of the transformation temperatures on heat treatment conditions and composition. Unlike Ni- rich films, the transformation temperatures of Ti-rich films are above the ambient temperature and largely depend on annealing temperatures from 600 to 120 K. But they remain relatively constant on the various annealing temperature domains, 600-740 K, 740-1000 K, 1000 K +, delimited by exothermic peaks originating from the formation of precipitates.