UV-detector based on pn-heterojunction diode composed of transparent oxide semiconductors, p-NiO-ZnO

摘要

A transparent ultraviolet (UV)-detector was fabricated using a high-quality pn-heterojunction diode composed of transparent oxide semiconductors, p-type NiO and n-type ZnO, and its UV-response was measured at room temperature. Transparent tri-layered oxide films of ZnO/NiO/ITO were heteroepitaxially grown on an YSZ (1 1 1) substrate by a pulsed-laser-deposition combined with a solid-phase-epitaxy technique and they were processed to fabricate a p-MO-ZnO diode. The diodes exhibited a clear rectifying Ⅰ-Ⅴ characteristic with an ideality factor of ～2 and a forward threshold voltage of ～1 V. Although the photo-responsivity was fairly weak at the zero bias voltage, it was enhanced up to ～0.3 A W~(-1) by applying a reverse bias of -6 V under an irradiation of 360-nm light, which is comparable to that of commercial devices.