Growth of highly (001)-textured strontium barium niobate thin films on epitaxial LaNiO_3/CeO_2/YSZ/Si(100)

摘要

(Sr,Ba)Nb_2O_6 (SBN) thin films were deposited on epitaxial LaNiO_3/CeO_2/YSZ/Si(100) substrates by a pulsed laser deposition method. Epitaxial-like highly (001)-textured SBN thin films were obtained on LaNiO_3/CeO_2/YSZ/Si(100). Phi scans on the (311) plane revealed that the films have two in-plane orientations. The unit cell of SBN is rotated in the plane of the film by 18.6°with respect to the unit cell of the Si substrate. These results were compared with those of SBN thin films deposited on Pt/Ti/SiO_2/Si substrates.