Fabrication of diamond-like carbon film on rubber by T-shape filtered-arc-deposition under the influence of various ambient gases

摘要

Diamond-like carbon (DLC) films were prepared on rubber substrates using T-shape filtered-arc-deposition (T-FAD), which effectively removes the macrodroplets emitted from the graphite cathode spot from the processing plasma. In the present study, the influence of ambient gas (no gas, Ar, H_2, C_2H_2, C_2H_4, CH_4) was investigated. The DLC films adhered well to the rubber substrate. When the substrate was stretched, the small DLC islands were separated and clefs were opened. The deposition rate on rubber was approximately twice higher than that on a Si substrate. When hydrocarbon gas was introduced as an ambient gas, the deposition rate became higher than that for no gas and H_2 gas. In the cases of C_2H_4 and CH_4 gases, the DLC film was considered to contain a considerable amount of hydrogen. When C_2H_2 gas was used, the highest deposition rate with less surface roughness was achieved.