Study of structure and optical properties of silver oxide films by ellipsometry, XRD and XPS methods

摘要

Ag_xO samples prepared in different O_2 gas ratio conditions and annealed at different temperatures have been studied by the spectroseopic ellipsometry, XRD and XPS methods. The optimal O_2/(O_2 + Ar) gas ratio for the sample preparation will be in the range 0.5-0.6, in which the optical constants become less changed. During annealing, the as-deposited amorphous structure of Ag_xO will be crystallized and the temperature-dependent decomposition will occur. The threshold of the decomposition temperature for AgO and Ag_2O is approximately 200℃ and 300℃, respectively. The results indicate that the samples annealed at the low and high O_2/(O_2 + Ar) gas ratio will have different structures, and the structure of Ag_2O is more stable with a lower oxygen diffusion rate in decomposition for the sample prepared in the higher O_2 gas ratio condition.