Mechanical properties evaluation of fluor-doped diamond-like carbon coatings by nanoindentation

摘要

Fluor-doped diamond-like carbon (DLC) films were grown by RF sputtering, varying the CF_4 partial pressure and the total gas pressure. Nanoindentation is required to evaluate the mechanical properties of such very thin films. The Vickers nanohardness and the Young's modulus values fall in the 55-70 GPa and 235-326 GPa ranges, respectively, the lowest values being observed for the highest degree of fluorine content in the film (80% CF_4 in the gas mixture) and for the highest processing pressure (1.5 kPa).