Direct patterning of crystallized BaTiO_3 and TiO_2 films in aqueous solutions

摘要

A direct patterning instrument and technique were developed that enabled direct fabrication of ceramic film patterns at room temperature, using laser beam activation of the interface between the substrate and an aqueous solution. It was shown that a crystallized BaTiO_3 pattern could be fabricated on a titanium substrate with a laser pattern generator, without heat treatment afterwards. The BaTiO_3 pattern had a line width of several tens of micrometers. The technique was also used to demonstrate the possibility of fabricating a TiO_2 line, several micrometers wide, on a silicon wafer.