The structure of Ta nanopillars grown by glancing angle deposition

摘要

Regular arrays of Ta nanopillars, 200 nm wide and 500 nm tall, were grown on SiO_2 nanosphere patterns by glancing angle sputter deposition (GLAD). Plan-view and cross-sectional scanning electron microscopy analyses show dramatic changes in the structure and morphology of individual nanopillars as a function of growth temperature T_s ranging from 200 to 700℃. At low temperatures, T_s ≤ 300℃, single nanopillars develop on each sphere and branch into subpillars near the pillar top. In contrast, T_s ≥ 500℃ leads to branching during the nucleation stage at the pillar bottom. The top branching at low T_s is associated with surface mounds on a growing pillar that, due to atomic shadowing, develop into separated subpillars. At high T_s, the branching occurs during the nucleation stage where multiple nuclei on a single SiO_2 sphere develop into subpillars during a competitive growth mode which, in turn, leads to intercolumnar competition and the extinction of some nanopillars.