Study of Ag nanoparticles incorporated SnO_2 transparent conducting films by photochemical metal-organic deposition

摘要

Ag nanoparticles with a narrow size distribution were prepared by spontaneous reduction of Ag 2-ethylhexanoate in dimethyl sulfoxide. According to the incorporation content, SnO_2 film transmittance was slightly reduced by light absorption of incorporated Ag nanoparticles. With incorporation of Ag nanoparticles, the crystallinity of the SnO_2 films slightly decreased and the film sheet resistance improved. The valence band maximum of SnO_2 films containing Ag nanoparticles indicated a shift towards the Fermi energy level, corresponding to an increase of electrons in the valence band from electron transfer from the Ag nanoparticles to the film. Direct-patterning of SnO_2 films with Ag nanoparticles was produced without photoresist or dry etching. These results suggest a micro-patterned system can be simply fabricated with low cost and the electrical properties of the SnO_2 films can be improved by incorporating Ag nanoparticles.