Structural, electrical and optical properties of indium-tin-oxide thin films prepared by pulsed laser deposition

摘要

In this work the indium-tin-oxide (ITO) thin films have been prepared by pulsed laser deposition on glass substrate. The structural, electrical and optical properties of the films have been studied as a function of substrate temperature and background deposition pressure. The dielectric function of ITO films was obtained in the wave-length range 220-2400 nm by fitting the measured transmission and reflection spectra to a dispersion relation, which combines the Drude model and Lorentz oscillator. The correlation between deposition conditions and physical properties of ITO films was observed and analysed.