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Structural studies on some doped CdS thin films deposited by thermal evaporation

机译:热蒸发沉积掺杂CdS薄膜的结构研究

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摘要

The influence of the Mn, Se and Sb impurities on the structure and morphology of CdS thin films grown on p~+ Si wafers was studied. The starting powders were mixed in the same molar ratios (0.3%) and deposited in the same conditions by vacuum thermal evaporation. X-ray diffraction(XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and reflectance studies made on thermal treated thin films (573 K, 2 h in air) evidenced that thin films have a hexagonal oriented structure, and that dopants enter into the CdS lattice merely by substitution. The dopant nature influences the thin film thickness and chemical composition. The doped CdS thin films have roughness in nanometer region and a reflectivity lower than 40%. Silicon substrate acts as a template and favors the retention of Mn and scatters the Sb dopants. The CdS:Se thin film is thicker than CdS:Mn and CdS:Sb ones and is a mixture of doped and undoped nanocrystals.
机译:研究了Mn,Se和Sb杂质对在p〜+ Si晶片上生长的CdS薄膜结构和形貌的影响。将起始粉末以相同的摩尔比(0.3%)混合并通过真空热蒸发在相同的条件下沉积。 X射线衍射(XRD),X射线光电子能谱(XPS),原子力显微镜(AFM)以及对热处理薄膜(573 K,在空气中放置2 h)进行的反射研究表明,薄膜具有六边形取向的结构,而掺杂剂仅通过取代进入CdS晶格。掺杂剂的性质会影响薄膜的厚度和化学成分。掺杂的CdS薄膜在纳米区域具有粗糙度并且反射率低于40%。硅衬底起模板的作用,并有助于保留Mn和分散Sb掺杂剂。 CdS:Se薄膜比CdS:Mn和CdS:Sb薄膜厚,并且是掺杂和未掺杂的纳米晶体的混合物。

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