Optical characterization of vanadium-titanium oxide films

摘要

Composite films of titanium and vanadium oxides (TVO) with various compositional ratios were prepared by sputtering deposition. The optical properties, crystalline structure and film morphology were investigated as a function of the composition. The results of thermochromism and X-ray diffraction suggest that the TVO films at any compositional ratios form substitutional solid solution of Ti and V, that is, Ti_xV_(1-x)O_2, where 0 is contained in x is contained in 1. Dielectric constants of the TVO films at any compositions were consistently determined at photon energies between 0.75 to 3 eV by employing the Lorentz-oscillator formula. With wide variation in x, the dielectric constants at visible and near-infrared wavelengths monotonically decrease down to the values of TiO_2, which suggests that dielectric constants of the TVO film can be precisely controlled by adjusting rf power in co-sputtering deposition.