Effect of TiO_x seed layer on the texture and electric properties in La and Ca modified PbTiO_3 thin films

摘要

Lanthanum-and calcium-modified PbTiO_3 (PLCT) ferroelectric thin films were successfully prepared on Pt (111)/Ti/SiO_2/Si substrates by pulsed laser deposition. Influence of TiO_x seed layer on texture and electric properties of PLCT films was investigated. It is found the PLCT films without seed layer exhibited highly (100)-textured, while using about 9 nm TiO_x as seed layer lead to highly (301)-textured. The PLCT film with TiO_x seed layer possess higher remnant polarization (Pr = 26 μC/cm~2), better pyroelectric coefficient and figure of merit at room temperature (p = 370 μC/ m~2k, F_d = 190 × 10~(-5) Pa~(-12)) than that of film without seed layer. The mechanism of the enhanced electric properties was also discussed.