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首页> 外文期刊>Thin Solid Films >Effect of growth temperature on the structural and transport properties of magnetite thin films prepared by pulse laser deposition on single crystal Si substrate
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Effect of growth temperature on the structural and transport properties of magnetite thin films prepared by pulse laser deposition on single crystal Si substrate

机译:生长温度对单晶硅衬底上脉冲激光沉积制备磁铁矿薄膜的结构和传输性能的影响

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摘要

Magnetite (Fe_3O_4) thin films are prepared by pulsed laser deposition using an α-Fe_2O_3 target on silicon (111) substrate in the substrate temperature range of 350 ℃ to 550 ℃. X-ray diffraction (XRD) measurement shows that the film deposited at 450 ℃ is a single phase Fe_3O_4 film oriented along [111] direction. However, the film grown at 350 ℃ reveals mixed oxide phases (FeO and Fe_3O_4), while the film deposited at 550℃ is a polycrystalline Fe_3O_4. X-ray photoelectron spectroscopy study confirms the XRD findings. Raman measurements reveal identical spectra for all the films deposited at different substrate temperatures. We observe abrupt increase in the resistivity behavior of all the films around Verwey transition temperature (T_V) (125 K-120 K) though the transition is broader in the film deposited at 350 ℃ We observe that the optimized temperature for the growth of Fe_3O_4 film on Si is 450 ℃. The electrical transport behavior follows Shklovskii and Efros variable range hopping type conduction mechanism below T_V for the film deposited at 450 ℃ possibly due to the granular growth of the film.
机译:在衬底温度为350到550℃的条件下,使用α-Fe_2O_3靶在硅(111)衬底上通过脉冲激光沉积法制备磁铁矿(Fe_3O_4)薄膜。 X射线衍射(XRD)测量表明,在450℃沉积的膜是沿[111]方向取向的单相Fe_3O_4膜。然而,在350℃下生长的膜显示出混合的氧化物相(FeO和Fe_3O_4),而在550℃下沉积的膜是多晶的Fe_3O_4。 X射线光电子能谱研究证实了XRD的发现。拉曼测量揭示了在不同基板温度下沉积的所有薄膜的光谱相同。我们观察到所有膜的电阻率行为在Verwey转变温度(T_V)(125 K-120 K)附近突然增加,尽管在350℃沉积的膜中转变范围更广。 Si上为450℃。在450℃下沉积的薄膜的电输运行为遵循Shklovskii和Efros的变范围跳跃型传导机制在T_V以下。

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