Radio Frequency Sputter Deposition Of High-quality Conductive And Transparent Zno: Al Films On Polymer Substrates For Thin Film Solar Cells Applications

摘要

Thick aluminum-doped zinc oxide films were deposited at substrate temperatures from 100 ℃ to room temperature on polyethylene terephthalate by radio frequency magnetron sputtering, varying the deposition parameters such as radio frequency power and working pressure. Structural, optical and electrical properties were analyzed using an x-ray diffractometer, a spectrophotometer and a four-point probe, respectively. Films were polycrystalline showing a strong preferred c-axis orientation (002). The best optical and electrical results were achieved using a substrate temperature of 100 ℃. Furthermore, high transmittances close to 80% in the visible wavelength range were obtained for those films deposited at the lowest Argon pressure used of 0.2 Pa. In addition, resistivities as low as 1.1 × 10~(-2) Ω cm were reached deposited at a RF power of 75 W. Finally, a comparison of the properties of the films deposited on polymer and glass substrates was performed, obtaining values of the figure of merit for the films on polymer comparable to those obtained on glass substrates, 17,700 Ω~(-1) cm~(-1) vs 14,900 Ω~(-1) cm~(-1), respectively.