Effect Of Lanio_3 Electrodes And Lead Oxide Excess On Chemical Solution Deposition Derived Pb(zr_x,ti_(1-x))o_3 Films

摘要

The effects of LaNiO_3 (LNO) and Pt electrodes on the properties of Pb(Zr_x,Ti_(1-x))O_3 (PZT) films were compared. Both LNO and PZT were prepared by chemical solution deposition (CSD) methods. Specifically, the microstructure of LNO and its influence on the PZT properties were studied as a function of PbO excess. Conditions to minimize the Pyrochlore phase and porosity were found. Remnant polarization, coercive field and fatigue limit were improved in the PZT/LNO films relative to the PZT/Pt films. Additionally, the PZT crystallization temperature over LNO was 500 ℃, about ～50 ℃ lower than over Pt. The crystallization temperature reported here is amongst the lowest values for CSD-based PZT films.