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首页> 外文期刊>Thin Solid Films >Ultra-short Pulse Laser Ablation Of Al_(70)cu_(20)fe_(10) Alloy: Nanoparticles Generation And Thin Films Deposition
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Ultra-short Pulse Laser Ablation Of Al_(70)cu_(20)fe_(10) Alloy: Nanoparticles Generation And Thin Films Deposition

机译:Al_(70)cu_(20)fe_(10)合金的超短脉冲激光烧蚀:纳米粒子的产生和薄膜沉积

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摘要

In this paper the deposition of thin films obtained from femtosecond laser ablation of an Al_(70)Cu_(10)Fe_(10) alloy is presented. In the plasma produced by ablation, a characteristic feature is the presence of hot nanoparticles that become evident several microseconds after the laser shot. The cooling mechanisms of these particles have been analysed together with the evolution of their composition. The results, compared with those previously obtained for Al_(65)Cu_(23)Fe_(12) quasicrystal, reveal a clear relation between the final composition of the particles and the high-temperature equilibrium vapor pressures of the different elements, suggesting a direct emission from the target rather than a gas phase formation. Analysis of the elemental composition through the cross-section of the as-deposited films helps to illustrate the role of nanoparticles in the film growth.
机译:本文介绍了飞秒激光烧蚀Al_(70)Cu_(10)Fe_(10)合金获得的薄膜的沉积。在通过烧蚀产生的等离子体中,一个特征是存在热的纳米颗粒,这些纳米颗粒在激光照射后几微秒内变得明显。对这些颗粒的冷却机理及其组成的演变进行了分析。与先前获得的Al_(65)Cu_(23)Fe_(12)准晶体的结果相比,该结果表明颗粒的最终组成与不同元素的高温平衡蒸气压之间存在明确的关系,这表明直接从目标发射,而不是气相生成。通过沉积薄膜横截面的元素组成分析有助于说明纳米粒子在薄膜生长中的作用。

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