Atomic Layer Deposition Of Iron(iii) Oxide On Zirconia Nanoparticles In A Fluidized Bed Reactor Using Ferrocene And Oxygen

摘要

Conformal films of amorphous iron(III) oxide and α-Fe_2O_3, have been coated on zirconia nanoparticles (26 nm) in a fluidized bed reactor by atomic layer deposition. Ferrocene and oxygen were alternately dosed into the reactor at temperatures between 367℃ and 534℃, Self-limiting chemistry was observed via in situ mass spectrometry, and by means of induced coupled plasma-atomic emission spectroscopy analysis. Film conformality and uniformity were verified by high resolution transmission electron microscopy, and the growth rate was determined to be 0.15 A per cycle. Energy dispersive spectroscopy. X-ray diffractometry, and X-ray photoelectron spectroscopy were utilized as a means to determine film composition at each deposition temperature. Over all of the deposition temperatures investigated, films were deposited as amorphous iron(III) oxide. However, after heat treatment at 850℃ in air and N_2 atmospheres, α-Fe_2O_3 was the predominant species.