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Carrier dynamics in coalescence overgrowth of GaN nanocolumns

机译:GaN纳米柱聚结过度生长中的载流子动力学

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摘要

Coalescence overgrowth of pattern-grown GaN nanocolumns on c-plane sapphire substrate with metal organic chemical vapor deposition is demonstrated. The subsequent coalescence overgrowth opens a possibility for dislocation reduction due to the lateral strain relaxation in columnar geometry. We present further growth optimization and innovative characterization of metal organic chemical vapor deposition layers, overgrown on the columnar structure with varying diameters of columns. Nano-imprint lithography was applied to open circular holes of 250,300,450, and 600 nm diameter on the SiO_2 layer, deposited on the GaN layer on the c-plane sapphire template. After the growth of ~ 1 μm high GaN nanocolumns, the further coalescence conditions led to an overgrown layer ~2 μm thickness. Photoelectrical and optical properties of the overgrown layers and a reference sample were investigated by time-resolved picosecond transient grating and time-integrated photoluminescence. We note a 3-4 fold increase in carrier lifetime in the overgrown epilayers when the diameter of columns increased from 250 to 450 nm. This feature is a clear indication of an ~4-fold reduced defect density.
机译:证明了通过金属有机化学气相沉积在c面蓝宝石衬底上以图形方式生长的GaN纳米柱的结合生长。由于柱状几何体中的横向应变松弛,随后的合并过度生长为位错减少提供了可能性。我们提出了进一步增长的优化和金属有机化学气相沉积层的创新特性,这些层在直径不同的柱状结构上长满。将纳米压印光刻技术应用于SiO_2层上直径250、300、450和600 nm直径的圆形圆孔,并沉积在c面蓝宝石模板上的GaN层上。在〜1μm高GaN纳米柱生长之后,进一步的聚结条件导致了〜2μm厚度的过长层。通过时间分辨皮秒瞬态光栅和时间积分光致发光研究了长满的层和参考样品的光电性能。我们注意到,当色谱柱的直径从250 nm增加到450 nm时,长满的外延层的载流子寿命增加了3-4倍。此功能清楚地表明缺陷密度降低了约4倍。

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