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Synthesis of SrSnO_3 thin films by pulsed laser deposition: Influence of substrate and deposition temperature

机译:脉冲激光沉积合成SrSnO_3薄膜:衬底和沉积温度的影响

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摘要

SrSnO_3 thin films were prepared by pulsed laser deposition on amorphous silica and single crystal substrates of R-sapphire, (100)LaAlO_3 and (100)SrTiO_3. High quality epitaxial (100) oriented films were obtained on LaAlO_3 and SrTiO_3 while a texture was revealed for films on sapphire deposited at the same deposition temperature of 700 ℃. Amorphous films were obtained on silica but a post annealing at 800 ℃ induced crystallization with a random orientation. The screening of deposition temperature showed epitaxial features on SrTiO_3 from 650 ℃ while no crystallization was observed at 600 ℃. The influence of substrate and deposition temperature was confirmed by Scanning Electron Microscopy and Atomic Force Microscopy observations.
机译:SrSnO_3薄膜是通过在无定形二氧化硅和R-蓝宝石(100)LaAlO_3和(100)SrTiO_3的单晶衬底上脉冲激光沉积制备的。在LaAlO_3和SrTiO_3上获得了高质量的外延(100)取向膜,同时在700℃的相同沉积温度下,在蓝宝石上显示出了织构。在二氧化硅上获得了非晶膜,但在800℃下的后退火引起了随机取向的结晶。沉积温度的筛选从650℃开始在SrTiO_3上具有外延特征,而在600℃没有观察到结晶。通过扫描电子显微镜和原子力显微镜观察证实了衬底和沉积温度的影响。

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  • 来源
    《Thin Solid Films》 |2010年第2期|p.614-618|共5页
  • 作者单位

    Sciences Chimiques de Rennes, UMR 6226 CNRS/Universite de Rennes 1, Campus de Beaulieu. 35042 Rennes cedex, France,IACOM, Dept. de Quimka, Universidade Federal de Paraiba, Campus I, CEP 58059-900 Joao Pessoa, PB, Brazil;

    Sciences Chimiques de Rennes, UMR 6226 CNRS/Universite de Rennes 1, Campus de Beaulieu. 35042 Rennes cedex, France;

    Sciences Chimiques de Rennes, UMR 6226 CNRS/Universite de Rennes 1, Campus de Beaulieu. 35042 Rennes cedex, France;

    Sciences Chimiques de Rennes, UMR 6226 CNRS/Universite de Rennes 1, Campus de Beaulieu. 35042 Rennes cedex, France;

    Sciences Chimiques de Rennes, UMR 6226 CNRS/Universite de Rennes 1, Campus de Beaulieu. 35042 Rennes cedex, France;

    Sciences Chimiques de Rennes, UMR 6226 CNRS/Universite de Rennes 1, Campus de Beaulieu. 35042 Rennes cedex, France;

    Dept. de Quimka Fundamental, Universidade Federal de Pernambuco, BR 50740-540 Recife, PB, Brazil;

    IACOM, Dept. de Quimka, Universidade Federal de Paraiba, Campus I, CEP 58059-900 Joao Pessoa, PB, Brazil;

    IACOM, Dept. de Quimka, Universidade Federal de Paraiba, Campus I, CEP 58059-900 Joao Pessoa, PB, Brazil;

    Sciences Chimiques de Rennes, UMR 6226 CNRS/Universite de Rennes 1, Campus de Beaulieu. 35042 Rennes cedex, France;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    perovskite; stannate; pulsed laser deposition; thin films; epitaxial growth;

    机译:钙钛矿锡脉冲激光沉积薄膜;外延生长;

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