On the structural, morphological, optical and electrical properties of sol-gel deposited ZnO:In films

摘要

Indium-doped zinc oxide thin films deposition was performed by the sol-gel technique using homogeneous and stable solutions of zinc acetate 2-hydrate and indium chloride in ethanol. Films were spin coated onto glass substrates. After drying and after a heat treatment at 450 ℃, highly transparent (80%-90%) films were obtained. The effect on the structural, morphological, optical and electrical thin films properties of the dopant concentration was investigated. The temperature dependencies of the electrical conductivity under vacuum and in open atmosphere were analysed and discussed.