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机译:通过低温铝诱导结晶获得的压阻多晶硅膜
Materials Science and Engineering Department, University of Texas at Arlington, P.O. Box 19031, Arlington, TX-76019, USA,Nanotechnology Research and Teaching Facility, University of Texas at Arlington, 500 S. Cooper Street, Arlington, TX-76019, USA;
Nanotechnology Research and Teaching Facility, University of Texas at Arlington, 500 S. Cooper Street, Arlington, TX-76019, USA,Electrical Engineering Department, University of Texas at Arlington, P.O. Box 19072, Arlington, TX-76019, USA;
Nanotechnology Research and Teaching Facility, University of Texas at Arlington, 500 S. Cooper Street, Arlington, TX-76019, USA,Electrical Engineering Department, University of Texas at Arlington, P.O. Box 19072, Arlington, TX-76019, USA;
aluminum-induced crystallization; polysilicon; piezoresistor;
机译:铝诱导结晶的纳米压阻多晶硅膜在压力传感中的应用
机译:利用铝诱导的HWCVD沉积a-Si:H结晶制备高规格因数压阻纳米晶Si膜
机译:利用低温铝诱导溅射沉积非晶硅膜结晶的压阻压力传感器
机译:低温固相结晶法制得低晶粒内缺陷密度的大晶粒多晶硅薄膜
机译:通过铝诱导结晶获得的纳米晶压阻多晶硅膜,用于压力传感应用。
机译:不同沉积温度下多晶硅纳米薄膜的压阻灵敏度线性和电阻时间漂移
机译:高性能短通道双栅极低温多晶硅薄膜晶体管使用准分子激光结晶