Properties of (K,Na)NbO_3-based lead-free piezoelectric films prepared by pulsed laser deposition

摘要

To investigate the properties of (K,Na)NbO_3-based lead-free piezoelectric films at the morphotropic phase boundary composition, we fabricated epitaxial [(K_(0.5)Na_(0.5))_(0.97)Li_(0.03)] (Nb_(0.8)Ta_(0.2))O_3 films on (001), (110) and (111)-oriented single crystal SrTiO_3 substrates by pulsed laser deposition. The structure and electrical properties of the films were studied. Dielectric constants of 540, 390 and 300 and remnant polarizations of 4.00,1.05, and 0.35μC/cm~2 were observed for the (001), (110) and (111) oriented films, respectively.