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Correlation between structure and optical properties in low emissivity coatings for solar thermal collectors

机译:太阳能集热器低辐射涂层的结构与光学性能之间的相关性

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摘要

We have investigated the relation between the structure and morphology of TiN coatings with their optical properties. Samples were deposited by magnetron sputtering and, by changing the deposition parameters, different textures and chemical compositions can be obtained as measured by X-ray diffraction and glow discharge optical emission spectroscopy respectively. The transmittance in the visible range, measured by spectroscopic ellipsometry, and the emittance, derived from reflectance in the far infrared range as measured by Fourier Transform Infrared Spectroscopy have been related to the nitrogen atomic content and the preferred crystalline orientations present in the TiN coatings. The visible transmittance of the coatings was found not to be dependent on the preferential orientation, while the emittance clearly improves with increasing the film thickness and the presence of both (111) and (200) crystal orientations.
机译:我们已经研究了TiN涂层的结构和形态与其光学性能之间的关系。通过磁控溅射沉积样品,并且通过改变沉积参数,可以分别通过X射线衍射和辉光放电光发射光谱法获得不同的织构和化学组成。通过傅里叶变换红外光谱法测量的在可见光范围内的透射率(通过光谱椭圆偏光法测量)和源自远红外范围的反射率的发射率与氮原子含量和TiN涂层中存在的优选晶体取向有关。发现涂层的可见光透射率不取决于优先取向,而随着膜厚度的增加以及(111)和(200)晶体取向的存在,发射率明显改善。

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  • 来源
    《Thin Solid Films》 |2010年第20期|P.5720-5723|共4页
  • 作者单位

    Instituto de Genoa de Materiales de Madrid, Consejo Superior de Investigaciones Cientificas, E-28049 Madrid, Spain Fundacion Rafael Escola, E-28001 Madrid, Spain;

    rnInstituto de Genoa de Materiales de Madrid, Consejo Superior de Investigaciones Cientificas, E-28049 Madrid, Spain Centro de Micro-Andlisis de Materiales, Universidad Autonoma de Madrid, E-28049 Madrid, Spain;

    rnInstituto de Genoa de Materiales de Madrid, Consejo Superior de Investigaciones Cientificas, E-28049 Madrid, Spain;

    Fundacion Rafael Escola, E-28001 Madrid, Spain;

    rnIsofoton, E-29590, Malaga, Spain;

    rnInstituto de Genoa de Materiales de Madrid, Consejo Superior de Investigaciones Cientificas, E-28049 Madrid, Spain;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    low-emissivity; TiN; optical transmittance; magnetron sputtering;

    机译:低发射率锡;透光率磁控溅射;
  • 入库时间 2022-08-17 13:43:04

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