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Role of surface properties of MoO_3-doped SnO_2 thin films on NO_2 gas sensing

机译:MoO_3掺杂SnO_2薄膜的表面性质对NO_2气敏的作用

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摘要

The role of surface morphology of MoO_3-doped SnO_2 thin film on the gas sensing properties is analyzed. SnO_2 thin films doped with 1,3, 5 and 10 wt% MoO_3 are prepared by sol-gel spin coating process. Structural and morphological properties are studied using glancing angle X-ray diffractometer, atomic force microscopy, transmission electron microscopy and high resolution transmission electron microscopy. Energy dispersive X-ray analysis and X-ray photoelectron spectroscopy studies are used for chemical analysis. A good correlation is found between the characteristics of the surface and gas sensing properties of these films. MoO_3 addition is found responsible for increase in acidic nature of films which in turn increases their sensitivity and selectivity towards NO_2 gas.
机译:分析了MoO_3掺杂的SnO_2薄膜的表面形貌对气体传感性能的影响。通过溶胶-凝胶旋涂工艺制备了掺有1、3、5、10 wt%MoO_3的SnO_2薄膜。使用掠角X射线衍射仪,原子力显微镜,透射电子显微镜和高分辨率透射电子显微镜研究了结构和形态特性。能量色散X射线分析和X射线光电子能谱研究用于化学分析。在这些膜的表面特性和气敏特性之间发现了良好的相关性。发现MoO_3的添加增加了膜的酸性,这反过来又增加了膜对NO_2气体的敏感性和选择性。

著录项

  • 来源
    《Thin Solid Films》 |2010年第14期|p.3982-3987|共6页
  • 作者单位

    1Thin Film Lab, Department of Physics, Indian Institute of Technology, Delhi 110016, India;

    1Thin Film Lab, Department of Physics, Indian Institute of Technology, Delhi 110016, India;

    1Thin Film Lab, Department of Physics, Indian Institute of Technology, Delhi 110016, India;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    tin dioxide; doped oxides; gas sensors; nitrogen dioxide;

    机译:二氧化锡掺杂氧化物气体传感器二氧化氮;

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