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机译:N_2流量对微波电子回旋共振磁控溅射沉积SiN_x薄膜力学性能的影响。
Institute of Optoelectronic Materials and Device, Dalian Jiaotong University, Dalian, 116028, China State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China;
rnState Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China;
rnState Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China;
rnState Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China;
rnState Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China;
silicon nitride; plasma processing and deposition; fourier-transform infrared spectroscopy; mechanical properties;
机译:射频磁控模式电子回旋共振溅射系统沉积玻璃基板上氧化锌膜的压电特性
机译:微波电子回旋共振磁控溅射低温制备透明,减反射的TiO_2薄膜,并以不同的O _2 / Ar比沉积(会议论文)
机译:N_2:(N_2 + Ar)的流量比和衬底温度对反应性直流磁控溅射制备氮化锆膜性能的影响
机译:射频磁控模式电子回旋共振(ECR)溅射系统沉积的高质量ZnO薄膜的特性
机译:通过微波,傅立叶变换红外光谱和原子吸收光谱法确定的气相物质的绝对浓度与沉积在电子回旋共振反应器中的二氧化硅膜的特性相关。
机译:磁控溅射沉积非晶碳膜的基体温度相关的微观结构和电子诱导的二次电子发射特性
机译:基板对磁控溅射制备TiO2薄膜结构,形貌和光学性质的影响