Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition

摘要

Various reactive gas phase treatments have been investigated as surface functionalization dry processes with the goal to improve the wettability of parylene C films, keeping good optical properties in the visible range. The films were grown on different substrates by chemical vapor deposition with thicknesses ranging from 300 to 1630 nm. The polymer surface was treated under ultra violet (UV) irradiation at 254 nm in reactive atmospheres including He, H_2O, H_2O_2, O_2 and ambient air. The UV/O_2 treatment is the most efficient since the water contact angle decreases from 100° to 6° while the transmittance is maintained at 90% in the visible wavelengths. Furthermore it exhibits long life stability. The functionalization mechanism is discussed in relation with previous reports.