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Effects of temperature and voltage mode on nanoporous anodic aluminum oxide films by one-step anodization

机译:一步阳极氧化温度和电压模式对纳米多孔阳极氧化铝膜的影响

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摘要

Many conventional anodic aluminum oxide (MO) templates were performed using two-step direct current anodization (DCA) at low temperature (0-5 ℃) to avoid dissolution effects. This process is relatively complex. Pulse anodization (PA) by switching between high and low voltages has been used to improve wear resistance and corrosion resistance in barrier type anodic oxidation of aluminum or hard anodization for current nano-technology. However, there are only few investigations of AAO by hybrid pulse anodization (HPA) with normal-positive and small-negative voltages, especially for the one-step anodization, to shorten the running time. In this article, the effects of temperature and voltage modes (DCA vs. HPA) on one-step anodization have been investigated. The porous AAO films were fabricated using one-step anodization in 0.5 M oxalic acid in different voltage modes including the HPA and DCA and the environment temperature were varied at 5-15 ℃. The morphology, pore size and oxide thickness of AAO films were characterized by high resolution field emission scanning electron microscope. The pore size distribution and circularity of AAO films can be quantitatively analyzed by image processing of SEM. The pore distribution uniformity and circularity of AAO by HPA is much better than DCA due to its effective cooling at relatively high temperatures. On the other hand, increasing environment temperature can increase the growth rate and enlarge the pore size of AAO films. The results of one-step anodization by hybrid pulse could promote the AAO quality and provide a simple and convenient fabrication compared to DCA.
机译:为了避免溶解效果,许多常规的阳极氧化铝(MO)模板都是在低温(0-5℃)下使用两步直流阳极氧化(DCA)进行的。这个过程比较复杂。通过在高电压和低电压之间切换而进行的脉冲阳极氧化(PA)已用于改善铝的势垒型阳极氧化或当前纳米技术的硬质阳极氧化中的耐磨性和耐腐蚀性。但是,只有很少的研究通过正负和小负电压的混合脉冲阳极氧化(HPA)来进行,特别是对于一步阳极氧化,以缩短运行时间。在本文中,研究了温度和电压模式(DCA与HPA)对一步阳极氧化的影响。在0.5 M的草酸中,在包括HPA和DCA在内的不同电压模式下,通过一步阳极氧化制备多孔AAO膜,环境温度在5-15℃范围内变化。用高分辨率场发射扫描电子显微镜表征了AAO薄膜的形貌,孔径和氧化物厚度。 AAO薄膜的孔径分布和圆度可以通过SEM图像处理进行定量分析。 HPA制备的AAO的孔分布均匀性和圆形度比DCA更好,这是因为它在相对较高的温度下可以有效冷却。另一方面,提高环境温度可以提高AAO薄膜的生长速度并扩大其孔径。与DCA相比,通过混合脉冲进行一步阳极氧化的结果可以提高AAO的质量并提供简单方便的制造方法。

著录项

  • 来源
    《Thin Solid Films》 |2011年第5期|p.1554-1558|共5页
  • 作者单位

    Department of Mechanical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, ROC;

    Department of Mechanical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, ROC;

    Department of Mechanical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, ROC;

    Department of Mechanical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, ROC;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    anodic aluminum oxide; hybrid pulse anodization; one-step anodization;

    机译:阳极氧化铝混合脉冲阳极氧化一键式阳极氧化;

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