机译:电感耦合等离子体化学气相沉积法在聚碳酸酯上沉积SiO_x掺杂的类金刚石碳膜的粘附性能
Department of Materials, Physics and Energy Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan;
Deptartment of Physical Electronics and Informatics, Osaka City University, 3-3-138 Sugimoto-cho, Sumiyoshi-ku, Osaka, 558-8585, Japan;
EcoTopia Science Research Institute, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan;
Department of Materials, Physics and Energy Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan, EcoTopia Science Research Institute, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan;
adhesion; diamond-like carbon (dlc); polycarbonate (pc); inductively coupled plasma chemical; vapor deposition (icp-cvd);
机译:在低压感应耦合等离子体中通过等离子体增强化学气相沉积制备的类金刚石碳膜的X射线反射法研究
机译:低频感应耦合等离子体反应器中类金刚石碳膜的等离子体增强化学气相沉积的E和H态
机译:衬底偏置电压和沉积压力对电感耦合等离子体辅助化学气相沉积产生的类金刚石碳性能的影响
机译:等离子体处理对电感耦合等离子体化学气相沉积沉积低介电常数氟化非晶碳膜结构和电性能的影响
机译:通过等离子体辅助化学气相沉积制备的类金刚石碳膜的热降解和摩擦学行为。
机译:可调材料属性与交联聚(N-乙烯基己内酰胺)的热响应性通过化学气相沉积沉积的薄膜
机译:射频电感耦合等离子体在金刚石状碳膜的化学气相沉积过程中的应用,用于改性沉积膜的性能
机译:通过等离子体增强化学气相沉积沉积的无定形碳膜作为平面化层。