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首页> 外文期刊>Thin Solid Films >Electrical memory features of ferromagnetic CoFeAISi nano-particles embedded in metal-oxide-semiconductor matrix
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Electrical memory features of ferromagnetic CoFeAISi nano-particles embedded in metal-oxide-semiconductor matrix

机译:嵌入金属氧化物半导体基体中的铁磁CoFeAISi纳米粒子的电存储特性

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摘要

Half-metallic Heusler material Co_2FeAl_0.5Si_0.5 (CFAS) nano-particles (NPs) embedded in metal-oxide-semiconductor (MOS) structures with thin HfO_2 tunneling and MgO control oxides were investigated. The CFAS NPs were prepared by rapid thermal annealing. The formation of well-controlled CFAS NPs on thin HfO_2 tunneling oxide was confirmed by atomic force microscopy (AFM). Memory characteristics of CFAS NPs in MOS devices exhibited a large memory window of 4.65 V, as well as good retention and endurance times of 10~5 cycles and 10~5 s, respectively, demonstrating the potential of CFAS NPs as promising candidates for use in charge storage.
机译:研究了半金属Heusler材料Co_2FeAl_0.5Si_0.5(CFAS)纳米颗粒(NPs)嵌入具有薄HfO_2隧穿和MgO控制氧化物的金属氧化物半导体(MOS)结构中。 CFAS NPs是通过快速热退火制备的。通过原子力显微镜(AFM)证实了在薄HfO_2隧穿氧化物上形成了受控的CFAS NP。 MOS器件中CFAS NP的存储特性显示出4.65 V的大存储窗口,分别具有10〜5个周期和10〜5 s的良好保留和持久时间,这证明了CFAS NPs有望用于半导体领域。电荷存储。

著录项

  • 来源
    《Thin Solid Films》 |2011年第18期|p.6160-6163|共4页
  • 作者单位

    Novel Functional Materials and Devices Laboratory, Department of Physics, Hanyang University, Seoul 133-791, Republic of Korea;

    Semiconductor R&D Center, Samsung Electronics Co. Ltd, Cyeonggi-Do 445-701, Republic of Korea;

    Novel Functional Materials and Devices Laboratory, Department of Physics, Hanyang University, Seoul 133-791, Republic of Korea;

    Novel Functional Materials and Devices Laboratory, Department of Physics, Hanyang University, Seoul 133-791, Republic of Korea;

    Novel Functional Materials and Devices Laboratory, Department of Physics, Hanyang University, Seoul 133-791, Republic of Korea;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    sputtering; heusler material; co_2feal_0.5si_0.5; nanoparticles; metal-oxide-semiconductor; capacitance-voltage;

    机译:溅射;休斯勒材料;co_2feal_0.5si_0.5;纳米粒子;金属氧化物半导体;电容电压;

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