机译:磷对化学CoWP膜铜扩散阻挡性能的影响
Department of Materials Science and Engineering, National Formosa University, Huwei, Taiwan ,Graduate Institute of Material Science and Green Energy Engineering, National Formosa University, Huwei, Taiwan;
Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan;
Department of Materials Science and Engineering, National Formosa University, Huwei, Taiwan ,Graduate Institute of Material Science and Green Energy Engineering, National Formosa University, Huwei, Taiwan;
Department of Materials Science and Engineering, National Formosa University, Huwei, Taiwan ,Graduate Institute of Material Science and Green Energy Engineering, National Formosa University, Huwei, Taiwan;
electroless cowp; diffusion barrier; cu_3si; cobalt silicide;
机译:化学CoWP作为化学铜和硅之间的扩散屏障
机译:氨基磺酸盐溶液化学镀CoWP薄膜的微观结构和材料性能
机译:成分对化学沉积Ni-Co-P合金薄膜作为铜金属化扩散阻挡层的影响
机译:化学镀100-200 nm厚CoWP膜的材料特性
机译:用于铜金属化的钨基扩散阻挡薄膜的化学气相沉积。
机译:SiNx扩散阻挡层厚度对溶胶-凝胶浸涂和反应磁控溅射获得的TiO2薄膜的结构性能和光催化活性的影响
机译:一种新的化学镍 - 钼 - 磷合金电镀浴和镀膜性能
机译:非晶金属合金:铜金属化薄膜扩散阻挡层的新进展