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Simulation based performance comparison of transistors designed using standard photolithographic and coarse printing design specifications

机译:使用标准光刻和粗糙印刷设计规范设计的晶体管的基于仿真的性能比较

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摘要

In this work a simulation based comparative study of organic field effect transistors designed using standard lithographic and printing designs is presented. The device simulations were performed using two-dimensional drift-diffusion equations with a Poole-Frenkel field dependent mobility model. Both photolithographic and coarse printing transistor designs employed common materials such as 150 nm thick pentacene, 150 nm thick parylene gate insulator, gold source-drain electrodes and aluminum gate electrodes. The major differences between the two fabrication specifications are the minimum source/ drain line width and the transistor channel length. The typical specifications for the minimum line width and channel length were 2 um and 5 pm for photolithography and 25 urn and 20 um for coarse printing techniques, respectively. The gate, source, and drain capacitances and channel on-resistances at various channel lengths and gate overlaps have been extracted and presented specifically for both process schemes. Due to increased channel length and gate-source/drain overlap of printed electrodes relative to lithographic design, the resulting on-resistance and capacitances for coarse printing are significantly higher. These results demonstrate a substantial operating frequency reduction for printing design relative to photolithographic design. For the tested materials and designs it is shown that the cut-off frequency for the photolithographic process was 400 kHz but decreased to a much lower 26 kHz for the coarse printing process. Since printing technology uses various other materials, which typically have less performance than the ones used for this simulation, the actual printed device might have even lower performance than predicted here.
机译:在这项工作中,提出了基于仿真的有机场效应晶体管的比较研究,该研究使用标准的光刻和印刷设计进行了设计。使用带有Poole-Frenkel场相关迁移率模型的二维漂移扩散方程进行器件仿真。光刻和粗糙印刷晶体管设计均采用常见材料,例如150 nm厚的并五苯,150 nm厚的聚对二甲苯栅极绝缘体,金源漏电极和铝栅电极。两种制造规范之间的主要区别是最小的源极/漏极线宽度和晶体管沟道长度。最小线宽和通道长度的典型规格分别为光刻技术的2 um和5 pm,以及粗糙印刷技术的25 um和20 um。已针对两种工艺方案提取并给出了各种沟道长度和栅极重叠处的栅极,源极和漏极电容以及沟道导通电阻。由于相对于平版印刷设计,增加了印刷电极的沟道长度和栅-源/漏重叠,因此,用于粗印刷的导通电阻和电容明显更高。这些结果证明相对于光刻设计,印刷设计的工作频率大大降低。对于测试的材料和设计,结果表明,光刻工艺的截止频率为400 kHz,但对于粗糙印刷工艺,截止频率降低到低得多的26 kHz。由于打印技术使用了各种其他材料,这些材料通常比用于此模拟的材料性能要差,因此实际的打印设备的性能可能甚至比此处预测的还要低。

著录项

  • 来源
    《Thin Solid Films》 |2011年第6期|p.1943-1949|共7页
  • 作者单位

    Department of Electrical Engineering, University of Texas at Tyler, 3900 University Blvd. Tyler TX 75799, USA;

    Department of Electrical Engineering, University of Texas at Tyler, 3900 University Blvd. Tyler TX 75799, USA;

    Department of Materials Science and Engineering, University of Texas at Dallas Richardson, TX 75080, USA;

    Department of Materials Science and Engineering, University of Texas at Dallas Richardson, TX 75080, USA;

    Army Research Laboratory, Adetphi, MD 20783, USA;

    Department of Electrical Engineering, University of Texas at Tyler, 3900 University Blvd. Tyler TX 75799, USA;

    Department of Materials Science and Engineering, University of Texas at Dallas Richardson, TX 75080, USA;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    photolithography; inkjet printing; pentacene; performance; switching speed; channel on-resistance; gate capacitance;

    机译:光刻;喷墨印刷;并五苯;性能;切换速度通道导通电阻;栅极电容;

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