机译:结晶纳米粒子掺入对通过等离子体化学气相沉积法沉积的微晶硅膜的生长,结构和性能的影响
Graduate School of Information Science and Electrical Engineering, Kyushu University, Motooka 744, Fukuoka 819-0395, Japan;
Graduate School of Information Science and Electrical Engineering, Kyushu University, Motooka 744, Fukuoka 819-0395, Japan;
Graduate School of Information Science and Electrical Engineering, Kyushu University, Motooka 744, Fukuoka 819-0395, Japan;
Graduate School of Information Science and Electrical Engineering, Kyushu University, Motooka 744, Fukuoka 819-0395, Japan;
Center for Research and Advancement in Higher Education, Kyushu University, Motooka 744, Fukuoka 819-0395, Japan;
Graduate School of Information Science and Electrical Engineering, Kyushu University, Motooka 744, Fukuoka 819-0395, Japan;
Center of Plasma Nano-interface Engineering, Graduate School of Information Science and Electrical Engineering, Kyushu University, Motooka 744, Fukuoka 819-0395, Japan;
Graduate School of Information Science and Electrical Engineering, Kyushu University, Motooka 744, Fukuoka 819-0395, Japan;
Graduate School of Information Science and Electrical Engineering, Kyushu University, Motooka 744, Fukuoka 819-0395, Japan;
multi-hollow discharge plasma CVD; nanoparticle; crystalline orientation; microcrystalline silicon; nucleation;
机译:稀释比和晶种层对热线化学气相沉积法沉积微晶硅薄膜结晶度的影响
机译:衬底对等离子体增强化学气相沉积法沉积微晶硅薄膜生长的影响
机译:在低温下通过等离子体沉积的微晶硅薄膜中的杂相生长增强了化学气相沉积
机译:等离子体增强化学气相沉积沉积低温p型氢化微晶硅薄膜的表征
机译:等离子体增强了硅薄膜的化学气相沉积:利用等离子体诊断技术表征不同频率和气体成分下的薄膜生长。
机译:射频等离子体增强化学气相沉积(RF PECVD)反应器中样品高度对氮化硅薄膜光学性能和沉积速率的影响
机译:等离子体增强化学气相沉积沉积氮化硅和氮氧化硅薄膜的材料结构和机械性能
机译:微波等离子体增强化学气相沉积法制备氮化硅晶体薄膜