Comparisons of the electrical characteristics by impedance matching conditions on the E-H and H-E transition and the hysteresis of inductively coupled plasma

摘要

Different electrical characteristics depending on the impedance matching conditions were observed in inductively coupled plasma during the E-H mode and H-E mode transition and their hysteresis. At the auto matching condition, there was no hysteresis loop on the E-H and H-E transition, while the hysteresis loop was clearly observed at the fixed matching condition. This result shows that the impedance matching condition is the primary cause for the hysteresis loop.