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High-quality epitaxial Bi(111) films on Si(111) by isochronal annealing

机译:等时退火在Si(111)上形成高质量的Bi(111)外延膜

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摘要

Bi(111) films grown on Si(111) at room temperature show a significantly higher roughness compared to Bi films grown on Si(100) utilizing a kinetic pathway based on a low-temperature process. Isochronal annealing steps of 3 min duration each with temperatures up to 200 ℃ cause a relaxation of the Bi films' lattice parameter toward the Bi bulk value and yield an atomically flat Bi surface. Driving force for the relaxation and surface reordering is the magic mismatch of 11 Bi atoms to 13 Si atoms that emerges at annealing temperatures above 150 ℃ and reduces the remaining strain to less than 0.2%.
机译:与在Si(100)上生长的Bi膜相比,在室温下在Si(111)上生长的Bi(111)膜表现出明显更高的粗糙度,而Bi膜利用基于低温工艺的动力学路径生长。 3分钟持续时间的等时退火步骤,每个步骤的最高温度为200℃,这会导致Bi薄膜的晶格参数朝Bi本体值松弛,并产生原子级平坦的Bi表面。弛豫和表面重排的驱动力是11 Bi原子与13 Si原子的魔术失配,该失配在退火温度高于150℃时出现,并将残余应变降低至小于0.2%。

著录项

  • 来源
    《Thin Solid Films》 |2012年第23期|p.6905-6908|共4页
  • 作者单位

    Department of Physics and Center for Nanointegration (CENIDE), University Duisburg - Essen, Lotharstrasse I, 47057 Duisburg, Germany;

    Department of Physics and Center for Nanointegration (CENIDE), University Duisburg - Essen, Lotharstrasse I, 47057 Duisburg, Germany;

    Department of Physics and Center for Nanointegration (CENIDE), University Duisburg - Essen, Lotharstrasse I, 47057 Duisburg, Germany;

    Department of Physics and Center for Nanointegration (CENIDE), University Duisburg - Essen, Lotharstrasse I, 47057 Duisburg, Germany;

    Department of Physics and Center for Nanointegration (CENIDE), University Duisburg - Essen, Lotharstrasse I, 47057 Duisburg, Germany;

    Department of Physics and Center for Nanointegration (CENIDE), University Duisburg - Essen, Lotharstrasse I, 47057 Duisburg, Germany;

    Department of Physics and Center for Nanointegration (CENIDE), University Duisburg - Essen, Lotharstrasse I, 47057 Duisburg, Germany;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    epitaxy; strain; annealing; bismuth; silicon;

    机译:外延应变;退火;铋;硅;

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