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Fabrication of TiO_2 thin film memristor device using electrohydrodynamic inkjet printing

机译:电液动力喷墨印刷制备TiO_2薄膜忆阻器

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摘要

In this paper, we are reporting the fabrication of memristor device (Ag/TiO_2/Cu) using electrohydrodynamic inkjet printing technology. The titanium oxide (TiO_2) active layer was deposited using electrohydrodynamic atomization technique. The metal electrodes were patterned by using electrohydrodynamic printing technique. The crystalline nature, surface morphology and optical properties of as deposited TiO_2 films were characterized using X-ray diffraction (XRD), scanning electron microscope (SEM) and UV-visible spectroscopic analysis respectively. XRD and SEM studies revealed that the presence of anatase TiO_2 with uniform deposition. The optical transmittance of the deposited TiO_2 films was observed to be 87% in the visible region. The fabricated memristor device (Ag/TiO_2/Cu) exhibits bipolar resistive switching behavior within the low operating voltage (± 0.7 V). Our results ensure that the printed technology provides breakthrough solution in the electronic memory device fabrication.
机译:在本文中,我们报道了使用电液动力喷墨打印技术制造忆阻器器件(Ag / TiO_2 / Cu)。使用电动流体雾化技术沉积了氧化钛(TiO_2)活性层。通过使用电动流体印刷技术对金属电极进行构图。分别用X射线衍射(XRD),扫描电子显微镜(SEM)和紫外可见光谱分析表征了沉积的TiO_2薄膜的晶体性质,表面形态和光学性质。 XRD和SEM研究表明,锐钛矿型TiO_2的存在具有均匀的沉积。在可见光区域观察到沉积的TiO_2薄膜的透光率为87%。制成的忆阻器器件(Ag / TiO_2 / Cu)在低工作电压(±0.7 V)内表现出双极电阻切换行为。我们的结果确保了印刷技术为电子存储设备制造提供了突破性的解决方案。

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