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首页> 外文期刊>Thin Solid Films >Deposition and characterization of IrO_x nanofoils on carbon nanotube templates by reactive magnetron sputtering
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Deposition and characterization of IrO_x nanofoils on carbon nanotube templates by reactive magnetron sputtering

机译:反应磁控溅射在碳纳米管模板上沉积和表征IrO_x纳米箔

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摘要

Large surface area IrO_x nanofoils (IrO_xNF) were deposited on multi-wall carbon nanotube (MWCNT) templates, forming IrO_x/MWCNT nanocomposites, by reactive radio frequency magnetron sputtering using Ir metal target The structural and spectroscopic properties of IrO_xNF were characterized. The micrographs of field emission scanning electron microscopy showed the formation of foil-like structure for the as-deposited samples. Trans mission electron microscopy analysis revealed the contiguous presence of glassy tridium O_xide, indium metal, and indium diO_xide nanocrystals in the foil. X-ray photoelectron spectroscopy analysis provided the information of the O_xidation states and the stoichiometry of IrO_xNF. Raman spectra revealed the amorphous-like phase of the as-deposited IrO_xNF. The nanofoil structure provided ultra-high surface area for electrical charge storage which made the lrO_x/MWCNT nanocomposites as an attractive candidate for the supercapacitor applications.
机译:通过使用Ir金属靶材进行反应性射频磁控溅射,将大表面积的IrO_x纳米箔(IrO_xNF)沉积在多壁碳纳米管(MWCNT)模板上,形成IrO_x / MWCNT纳米复合材料。场发射扫描电子显微镜的显微照片显示了所沉积样品的箔状结构的形成。透射电子显微镜分析显示箔中连续存在玻璃态的三氧化二锡,铟金属和二氧化铟纳米晶体。 X射线光电子能谱分析提供了O_氧化态和IrO_xNF化学计量的信息。拉曼光谱揭示了所沉积的IrO_xNF的非晶态相。纳米箔结构为电荷存储提供了超高的表面积,这使lrO_x / MWCNT纳米复合材料成为超级电容器应用的有吸引力的候选材料。

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  • 来源
    《Thin Solid Films》 |2012年第7期|p.2409-2413|共5页
  • 作者单位

    Department of Electronic Engineering, National Taiwan University of Science and Technology. 43 Keelung Road, Section 4, Taipei 106, Taiwan;

    Department of Electronic Engineering, National Taiwan University of Science and Technology. 43 Keelung Road, Section 4, Taipei 106, Taiwan;

    Department of Electronic Engineering, National Taiwan University of Science and Technology. 43 Keelung Road, Section 4, Taipei 106, Taiwan;

    Department of Electronic Engineering, National Taiwan University of Science and Technology. 43 Keelung Road, Section 4, Taipei 106, Taiwan,Graduate Institute of Electro-Optical Engineering, National Taiwan University of Science and Technology, 43 Keelung Road, Section 4, Taipei 106, Taiwan;

    Department of Chemical Engineering, National Taiwan University of Science and Technology, 43 Keelung Road, Section 4, Taipei 106, Taiwan;

    Department of Electrical Engineering, National Taiwan Ocean University, Keelung 202, Taiwan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    electron microscopy; raman scattering; reactive magnetron sputtering; nanocomposites; oxides;

    机译:电子显微镜;拉曼散射反应磁控溅射;纳米复合材料氧化物;

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