Synthesis and characterization of Cu-Al-Ni shape memory alloy multilayer thin films $1J.F. Gomez-Cortes

摘要

Among active materials, shape memory alloys are well recognized for their work output density. Because of that these alloys have attracted much attention to be used in microano electromechanical systems. In the present work, the electron beam evaporation technique has been used to growth, by a multilayer method, two shape memory alloy thin films with different Cu-Al-Ni composition. Multilayers have been further thermally treated to produce the alloys by solid solution diffusion. The produced multilayers have been characterized and the presence of the martensite phase in the obtained thin films was studied. Furthermore, the influence of two different coatings onto the Si substrates, namely Si/SiO_2 and Si/Si_3N_4. was investigated. Mechanically stable, not detaching from the substrates, Cu-Al-Ni shape memory alloy thin films, about 1 micrometre thick, showing a martensitic transformation have been produced.