An efficient rough-interface scattering model for embedded nano-structures

摘要

We use experimental Bidirectional Reflectance Distribution Function data to construct a heuristic surface transfer function for a rough contaminated substrate. The transfer function is then used in conjunction with our already validated, efficient numerical solver for scattering by particles on smooth surfaces to achieve fast and accurate computation for scattering by nano-structures embedded in rough substrates. We show that the order in which the heuristic surface transfer function and the scattering solver are used influences the numerical results.