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机译:射频空心阴极法快速沉积类金刚石碳膜
Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083, China;
Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083, China;
Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083, China;
Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083, China;
State Key Laboratory of Nonlinear Mechanics, Chinese Academy of Sciences, Beijing 100080, China;
Department of Mechanical Engineering, University of South Florida, Tampa, FL 33620, USA;
diamond-like carbon films; hollow cathode; deposition rate; raman spectra; nanohardness;
机译:氮化硅射频溅射结合石墨的滤波阴极电弧沉积制备的SiN_x /类金刚石复合碳膜中的化学键合
机译:射频等离子体增强化学气相沉积法沉积氮化硅和类金刚石碳膜的光学性能随沉积时间的变化
机译:厚,低应力金刚石状碳膜的空心 - 阴极化学气相沉积
机译:在电子回旋共振射频放电中的等离子体沉积金刚石碳和碳 - 氮化物膜
机译:类金刚石碳(DLC)膜沉积的数学模拟。
机译:环境气体和压力在脉冲激光沉积合成硬质类金刚石碳膜的结构中的作用
机译:通过射频中空阴极法快速沉积金刚石碳膜
机译:高强度脉冲离子束沉积制备类金刚石碳和氮化硼薄膜