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Low temperature ordering and high (001) orientation of [Fe/Pt/Cu]_(18) multilayer films

机译:[Fe / Pt / Cu] _(18)多层膜的低温有序化和高(001)取向

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摘要

[Fe/Pt/Cu]_(18) multilayer films with different Cu thicknesses were prepared on thermally oxidized Si (111) substrates at room temperature using dc- and rf-magnetron sputtering. The magnetic properties and microstruc-ture of [Fe/Pt/Cu]_(18) multilayer films annealed at various temperatures have been investigated. Compared with pure [Fe/Pt]_(18) multilayer films low-temperature ordering and (001) orientation in the annealed films with Cu volume concentration below 20% can be obtained. During annealing process Cu atoms diffused into FePt lattice which enhanced the diffusion of Fe and Pt atoms and the grain growth of the films. The perpendicular anisotropy and hard magnetic properties of the films deteriorated with increasing Cu volume concentration due to the formation of Ll_0 FeCuPt_2 phase.
机译:在室温下,使用直流和射频磁控溅射在热氧化的硅(111)衬底上制备具有不同铜厚度的[Fe / Pt / Cu] _(18)多层膜。研究了在不同温度下退火的[Fe / Pt / Cu] _(18)多层膜的磁性和微观结构。与纯的[Fe / Pt] _(18)多层膜相比,退火体积中的Cu体积浓度低于20%时,可以获得低温有序和(001)取向。在退火过程中,Cu原子扩散到FePt晶格中,这增强了Fe和Pt原子的扩散以及薄膜的晶粒长大。由于Ll_0 FeCuPt_2相的形成,膜的垂直各向异性和硬磁性能随Cu体积浓度的增加而降低。

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  • 来源
    《Thin Solid Films》 |2013年第15期|460-465|共6页
  • 作者单位

    School of Materials Science and Engineering, Jilin University, Changchun 130025, China;

    Nebraska Center for Materials and Nanoscience, University of Nebraska, Lincoln, NE 68588, USA;

    Nebraska Center for Materials and Nanoscience, University of Nebraska, Lincoln, NE 68588, USA Department of Physics and Astronomy, University of Nebraska, Lincoln, NE 68588, USA;

    School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China;

    College of Physics, jilin Normal University, Siping 136000, China;

    Nebraska Center for Materials and Nanoscience, University of Nebraska, Lincoln, NE 68588, USA Department of Physics and Astronomy, University of Nebraska, Lincoln, NE 68588, USA;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    iron platinum copper films; texture; low temperature ordering; sputtering; annealing; multilayer films;

    机译:铁铂铜膜;质地;低温订购;溅射退火;多层膜;

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