Large piezoelectric effect in lead-free Ba(Zr_(0.2)Ti_(0.8))O_3-(Ba_(0.7)Ca_(0.3))TiO_3 films prepared by screen printing with solution infiltration process

摘要

High-quality piezoelectric Ba(Zr_(0.2)Ti_(0.8))O_3-50(Ba_(0.47)Ca_(0.3))TiO_3 films with very dense and homogenous micro-structure were fabricated using chemical solution infiltration into porous screen-printed films. The films with a thickness of 10μm exhibited high relative permittivity of 2380, low dielectric loss of 1.6% (at 10 kHz), large remanent polarization of 22 μC/cm~2, and large longitudinal piezoelectric constant d_(33) of 220 pC/N, which is even better than the case of lead-based piezoelectric films. The excellent electrical properties make the films a promising candidate for practical applications in lead-free microdevices such as piezoelectric microelectromechanical systems.