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机译:通过剂量依赖性载流子产生机理通过砷离子注入对BaSi_2外延膜进行N型掺杂
Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan,Core Research for Evolutional Science and Technology, Japan Science and Technology Agency, Gobancho, Chiyoda, Tokyo 102-0076, Japan;
Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan,Core Research for Evolutional Science and Technology, Japan Science and Technology Agency, Gobancho, Chiyoda, Tokyo 102-0076, Japan;
Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennohdai Tsukuba, Ibaraki 305-8573, Japan;
Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennohdai Tsukuba, Ibaraki 305-8573, Japan;
Core Research for Evolutional Science and Technology, Japan Science and Technology Agency, Gobancho, Chiyoda, Tokyo 102-0076, Japan,Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennohdai Tsukuba, Ibaraki 305-8573, Japan;
Barium silicide; Silicide semiconductor; Epitaxial film; Arsenic impurity; Ion implantation;
机译:通过磷离子注入和热退火对BaSi_2外延膜进行N型掺杂
机译:由分子束外延生长的掺杂N型Basi_2外延膜的制备
机译:离子注入BaSi_2外延膜中磷掺杂的结构研究
机译:氟对掺砷非晶硅和多晶硅外延生长的影响,氯对掺砷多晶硅外延生长的影响
机译:分子束外延生长外延汞碲化镉薄膜中砷的掺入和P型掺杂的研究。
机译:Sn掺杂对掺Fe的In2O3外延膜形貌和性能的影响
机译:共掺杂外延钛酸盐薄膜中可见光载流子的产生