Texture and magnetic properties of Fe thin films fabricated by field-sputtering vs field-annealing

摘要

The effect of the external magnetic field during magnetic thin film fabrication process on texture formation and magnetic properties has been studied by conducting and comparing the field-sputtered vs the field-annealed Fe thin films. The crystal orientations of the films were analyzed in both perpendicular direction and lateral direction in relation to the film surface, using a 3-axis-rotation X-ray goniometer. When the external magnetic field was imposed on the direction parallel to the film surface during the field-sputtering and the field-annealing, the < 110 >// normal direction fiber texture in the no-field-sputtered Fe film was substantially reduced, whereas the < 110 >// field direction fiber texture was enhanced. The field-sputtering was much more effective than the field-annealing in the formation of the perpendicular magnetic anisotropy because of the decline of the < 110 > orientations in the out-of-plane direction and its enhancement in the in-plane direction. (C) 2015 Elsevier B.V. All rights reserved.