Influence of various Si layers on the interlayer thicknesses of then direct current magnetron sputtered Fe/Si multilayers

摘要

This work investigates the interfacial asymmetry of Fe/Si multilayer films with different thicknesses of Si layer. Four samples of Fe/Si multilayers with monotonically increased Si layer thicknesses were fabricated by using direct current magnetron sputtering technique. Grazing incidence X-ray reflectometry measurement and high resolution transmission electron microscopy were carried out to characterize the inter-diffusion at the interfaces, and selected area electron diffraction technique was u