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机译:电子自旋共振测量真空紫外线对低k有机硅玻璃(SiCOH)缺陷的影响
Univ Wisconsin, Plasma Proc & Technol Lab, Madison, WI 53706 USA|Univ Wisconsin, Dept Elect & Comp Engn, 1415 Johnson Dr, Madison, WI 53706 USA;
Univ Wisconsin, Plasma Proc & Technol Lab, Madison, WI 53706 USA|Univ Wisconsin, Dept Elect & Comp Engn, 1415 Johnson Dr, Madison, WI 53706 USA;
Univ Wisconsin, Plasma Proc & Technol Lab, Madison, WI 53706 USA|Univ Wisconsin, Dept Elect & Comp Engn, 1415 Johnson Dr, Madison, WI 53706 USA;
Univ Wisconsin, Plasma Proc & Technol Lab, Madison, WI 53706 USA|Univ Wisconsin, Dept Elect & Comp Engn, 1415 Johnson Dr, Madison, WI 53706 USA;
Univ Leuven, Dept Phys & Astron, B-3001 Leuven, Belgium;
NCUT, Beijing 100144, Peoples R China;
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium;
Natl Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan;
Natl Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan;
Natl Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan;
Stanford Univ, Dept Elect Engn, Stanford, CA 94395 USA;
Univ Wisconsin, Plasma Proc & Technol Lab, Madison, WI 53706 USA|Univ Wisconsin, Dept Elect & Comp Engn, 1415 Johnson Dr, Madison, WI 53706 USA;
Low-k; Dielectrics; Vacuum ultraviolet; Damage; Defect concentrations; Electron spin resonance;
机译:用电子自旋共振测量低k有机硅酸盐玻璃中的缺陷及其对加工的响应
机译:等离子体和真空紫外线照射对低k多孔有机硅酸盐玻璃机械性能的影响
机译:电子自旋共振法测量真空紫外线和紫外线辐射对(100)Si上超薄氧化ha介电层的影响
机译:真空紫外辐射对低k多孔有机硅玻璃的损害
机译:使用组合紫外线和真空 - 紫外线辐射对有机硅酸盐玻璃上的非热固化过程的电气和机械效应
机译:辐射对核酸及其成分的电子自旋共振研究
机译:电子自旋共振测量真空紫外辐射对低k有机硅玻璃(SiCOH)缺陷的影响
机译:掺杂二氧化硅玻璃中辐射诱导缺陷中心的电子顺磁共振和光学研究