Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study

摘要

The X-ray absorption near edge structure (XANES), X-ray photoelectron spectroscopy (XPS), valence band photoemission (VB-PES) and Raman spectroscopy results show that the incorporation of nitrogen in pulsed laser deposited diamond like carbon (DLC) thin films, reverts the sp(3) network to sp(2) as evidenced by an increase of the sp(2) cluster and I-D/I-G ratio in C K-edge XANES and Raman spectra respectively which reduces the hardness/Young's modulus into the film network. Si-doped DLC film deposited in a plasma enhanced chemical vapour deposition process reduces the sp(2) cluster and I-D/I-G ratio that causes the decrease of hardness/Young's modulus of the film structure. The Fe-doped DLC films deposited by dip coating technique increase the hardness/Young's modulus with an increase of sp(3)-content in DLC film structure. (C) 2016 Elsevier B.V. All rights reserved.