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首页> 外文期刊>Thin Solid Films >Investigation on influence of deposition rate of YBa2Cu3O7-delta superconducting film prepared on Hastelloy C276 substrate by spray atomizing and coprecipitating laser chemical vapor deposition
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Investigation on influence of deposition rate of YBa2Cu3O7-delta superconducting film prepared on Hastelloy C276 substrate by spray atomizing and coprecipitating laser chemical vapor deposition

机译:喷雾雾化共沉淀激光化学气相沉积法在Hastelloy C276衬底上制备YBa2Cu3O7-δ超导膜的沉积速率影响研究

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摘要

YBa2Cu3O7 - delta (YBCO) films were prepared at deposition rates ranging from 10 to 55 mu m h(-1) on CeO2/LaMnO3/MgO/Gd2Zr2O7/Hastelloy C276 substrate by spray atomizing and coprecipitating laser chemical vapor deposition. At a deposition rate of 10 mu m h(-1), a c-axis-oriented YBCO film with a high critical temperature (T-C) of 91 K and critical current density (J(C)) of 2.4 MA cm(-2) was prepared, which showed an epitaxial growth mode of YBCO [001]//CeO2 [100] (YBCO [100]//CeO2 [011]). The full width at half maximum (FWHM) of the omega-scan and that of the phi-scan of the YBCO film were 1.9 degrees and 3.2 degrees, respectively. At a deposition rate of 45 mu m h(-1), an a-axis-oriented YBCO film with a T-C of 78 K and a J(C) of 0.4 MAcm(-2) was obtained. The YBCO film showed an epitaxial growth mode of YBCO [100]//CeO2 [100] (YBCO [001]//CeO2 [011]) and had the FWHM of 4.9 degrees for the omega-scan and that of 9.5 degrees for the f-scan, respectively. (C) 2016 Elsevier B.V. All rights reserved.
机译:通过喷雾雾化和共沉淀激光化学气相沉积法在CeO2 / LaMnO3 / MgO / Gd2Zr2O7 / Hastelloy C276基板上以10到55μmh(-1)的沉积速率制备YBa2Cu3O7-δ(YBCO)膜。沉积速率为10μmh(-1)时,c轴取向的YBCO膜具有91 K的高临界温度(TC)和2.4 MA cm(-2)的临界电流密度(J(C))制备后,显示出YBCO [001] // CeO2 [100](YBCO [100] // CeO2 [011])的外延生长模式。 YBCO膜的Ω扫描和phi扫描的半峰全宽(FWHM)分别为1.9度和3.2度。以45μmh(-1)的沉积速率,获得T-C为78 K,J(C)为0.4 MAcm(-2)的a轴取向YBCO膜。 YBCO膜的外延生长模式为YBCO [100] // CeO2 [100](YBCO [001] // CeO2 [011]),Ω-扫描的FWHM为4.9度,FWHM为9.5度。 f扫描。 (C)2016 Elsevier B.V.保留所有权利。

著录项

  • 来源
    《Thin Solid Films》 |2016年第29期|179-186|共8页
  • 作者单位

    Wuhan Inst Technol, Hubei Key Lab Plasma Chem & Adv Mat, Sch Mat Sci & Engn, Key Lab Green Chem Proc,Minist Educ, Wuhan 430074, Peoples R China;

    Wuhan Inst Technol, Hubei Key Lab Plasma Chem & Adv Mat, Sch Mat Sci & Engn, Key Lab Green Chem Proc,Minist Educ, Wuhan 430074, Peoples R China;

    Wuhan Inst Technol, Hubei Key Lab Plasma Chem & Adv Mat, Sch Mat Sci & Engn, Key Lab Green Chem Proc,Minist Educ, Wuhan 430074, Peoples R China;

    Wuhan Inst Technol, Hubei Key Lab Plasma Chem & Adv Mat, Sch Mat Sci & Engn, Key Lab Green Chem Proc,Minist Educ, Wuhan 430074, Peoples R China;

    Wuhan Inst Technol, Hubei Key Lab Plasma Chem & Adv Mat, Sch Mat Sci & Engn, Key Lab Green Chem Proc,Minist Educ, Wuhan 430074, Peoples R China;

    Wuhan Inst Technol, Hubei Key Lab Plasma Chem & Adv Mat, Sch Mat Sci & Engn, Key Lab Green Chem Proc,Minist Educ, Wuhan 430074, Peoples R China;

    Wuhan Inst Technol, Hubei Key Lab Plasma Chem & Adv Mat, Sch Mat Sci & Engn, Key Lab Green Chem Proc,Minist Educ, Wuhan 430074, Peoples R China;

    Wuhan Inst Technol, Hubei Key Lab Plasma Chem & Adv Mat, Sch Mat Sci & Engn, Key Lab Green Chem Proc,Minist Educ, Wuhan 430074, Peoples R China;

    Tohoku Univ, Inst Mat Res, Katahira 2-1-1, Sendai, Miyagi 9808577, Japan;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    YBCO film; Spray atomizing and coprecipitating laser; chemical vapor deposition; High deposition rate;

    机译:YBCO薄膜;喷雾雾化共沉淀激光;化学气相沉积;高沉积速率;

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