Grazing incidence mirrors with enhanced reflectance in the soft X-ray region

摘要

A design strategy for the fabrication broadband grazing incidence mirrors in the wavelength range of 0.8-18 nm is proposed. Instead of high-density materials, we propose a bilayer coating consisting of the high-density material most suitable for the task coated with a thin film of low-density material. In the wavelength range of 4-18 nm, an increase of the reflection coefficients of such coatings by 10-20% compared with the single high-density layers traditionally used is theoretically expected. We also present an experimental demonstration of such advantageous properties based on a Cr-C bilayer film. (C) 2015 Elsevier B.V. All rights reserved.