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Fabrication of large-area, close-packed, monolayer colloidal crystals via a hybrid method of spin coating and peeling-draining

机译:通过旋涂和剥离排水的混合方法制造大面积,密堆积的单层胶体晶体

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摘要

Large-area; close-packed, monolayer colloidal crystals can be used as templates in the preparation of microano films. This work proposes a hybrid method of spin coating and peeling-draining for the production of large-area, close-packed, monolayer colloidal crystals. First, large-area monolayer polystyrene (PS) colloidal crystals were obtained through spin coating. Then, the colloidal crystal film was peeled from surface of the intermediate spin-coated silicon wafer and transferred to another substrate using a customized experimental device. Oxygen plasma treatment was utilized to modify the wettability of the silicon wafer, increase the uniformity of spin coating, and reduce the adhesion work of peeling. The key process parameters, such as the duration of oxygen plasma treatment, spin speed, peeling speed, and drop rate of water surface, of the proposed method were thoroughly analyzed and optimized. Three-inch, wafer-scale, large-area, close-packed monolayer colloidal crystals were obtained using the proposed method, which combines the advantages of spin coating and gas-liquid interface self assembly and offers a stable and controllable approach to the fabrication of monolayer PS colloidal crystals. (C) 2017 Elsevier B.V. All rights reserved.
机译:大面积;紧密堆积的单层胶体晶体可用作制备微/纳米膜的模板。这项工作提出了一种旋涂和剥离排水的混合方法,用于生产大面积,密堆积的单层胶体晶体。首先,通过旋涂获得大面积单层聚苯乙烯(PS)胶体晶体。然后,将胶态晶体膜从中间旋涂硅晶片的表面剥离,并使用定制的实验装置将其转移到另一基板上。利用氧等离子体处理来改变硅晶片的润湿性,增加旋涂的均匀性,并减少剥离的粘附力。对所提出的方法的关键工艺参数,如氧等离子体处理的持续时间,旋转速度,剥离速度和水表面的滴落率进行了彻底的分析和优化。使用所提出的方法获得了三英寸,晶圆级,大面积,密堆积的单层胶体晶体,该晶体结合了旋涂和气液界面自组装的优点,并提供了一种稳定且可控的方法来制造单层PS胶体晶体。 (C)2017 Elsevier B.V.保留所有权利。

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